Effect of Methane Pressure on the Size of Carbon Nanoparticles Deposited by Pulsed Plasma Enhanced Chemical Vapor Deposition

Effect of Methane Pressure on the Size of Carbon Nanoparticles Deposited by Pulsed Plasma Enhanced Chemical Vapor Deposition The nanoparticles of carbon were deposited from methane under the potential of a pulsed direct current discharge. The deposition was carried without external heating. The size, chemistry, and structure of carbon nanoparticles were characterized using transmission electron […]

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